Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815357 | Process and apparatus for manufacturing a semiconductor device | Noriyuki Sakuma, Hiroshi Nakano, Takeyuki Itabashi, Haruo Akahoshi | 2004-11-09 |
| 6800557 | Process for manufacturing semiconductor integrated circuit device | Naofumi Ohashi, Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada +2 more | 2004-10-05 |
| 6774041 | Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device | Seiichi Kondo, Masaaki Fujimori, Noriyuki Sakuma | 2004-08-10 |
| 6750128 | Methods of polishing, interconnect-fabrication, and producing semiconductor devices | Seiichi Kondo, Noriyuki Sakuma | 2004-06-15 |
| 6719618 | Polishing apparatus | Seiichi Kondo, Noriyuki Sakuma, Youhei Yamada, Takeshi Kimura, Hiroki Nezu | 2004-04-13 |
| 6676496 | Apparatus for processing semiconductor wafers | Kan Yasui, Shigeo Moriyama, Katsuhiko Yamaguchi | 2004-01-13 |