Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835117 | Endpoint detection in chemical-mechanical polishing of patterned wafers having a low pattern density | Xinhui Wang, Leping Li, Yingru Gu | 2004-12-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835117 | Endpoint detection in chemical-mechanical polishing of patterned wafers having a low pattern density | Xinhui Wang, Leping Li, Yingru Gu | 2004-12-28 |