Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815345 | Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing | Yan Zhao, Chang-Chun Yeh, Zhongwei Chen | 2004-11-09 |
| 6710342 | Method and apparatus for scanning semiconductor wafers using a scanning electron microscope | Zhong-Wei Chen | 2004-03-23 |