Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815345 | Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing | Chang-Chun Yeh, Zhongwei Chen, Jack Jau | 2004-11-09 |