Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777675 | Detector optics for electron beam inspection system | Edward Yin, Frank Tsai | 2004-08-17 |
| 6738506 | Image processing system for multi-beam inspection | S. Daniel Miller, Steven B. Hobmann | 2004-05-18 |
| 6734428 | Multi-beam multi-column electron beam inspection system | S. Daniel Miller | 2004-05-11 |