Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753538 | Electron beam processing | Christian R. Musil, Thomas J. Gannon, Clive D. Chandler, Xiadong Da | 2004-06-22 |
| 6709554 | Method and apparatus for repairing lithography masks using a charged particle beam system | David C. Ferranti, Sharon M. Szelag | 2004-03-23 |