Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831272 | Gas cluster ion beam size diagnostics and workpiece processing | Michael E. Mack | 2004-12-14 |
| 6737643 | Detector and method for cluster ion beam diagnostics | Matthew C. Gwinn, Jerald P. Dykstra | 2004-05-18 |