Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770874 | Gas cluster ion beam size diagnostics and workpiece processing | — | 2004-08-03 |
| 6737643 | Detector and method for cluster ion beam diagnostics | Richard Torti, Matthew C. Gwinn | 2004-05-18 |