Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803158 | Photomask and method for forming an opaque border on the same | Joseph Gordon, Gregory P. Hughes, Hakki Ufuk Alpay | 2004-10-12 |
| 6803160 | Multi-tone photomask and method for manufacturing the same | Eric Johnstone | 2004-10-12 |
| 6780548 | Alternating aperture phase shifting photomask with improved transmission balancing | — | 2004-08-24 |
| 6759171 | Alternating aperture phase shifting photomask with improved intensity balancing | — | 2004-07-06 |
| 6721695 | Method and apparatus for evaluating the runability of a photomask inspection tool | Xiaoming Chen, Charles H. Howard, Kong Son, Paul Chipman | 2004-04-13 |