Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790286 | Substrate processing apparatus | Joichi Nishimura, Masami Ohtani, Kenji Hashinoki, Koji Hashimoto | 2004-09-14 |
| 6790287 | Substrate processing apparatus, substrate inspection method and substrate processing system | Kenji Hashinoki, Masami Ohtani, Joichi Nishimura | 2004-09-14 |