Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790286 | Substrate processing apparatus | Joichi Nishimura, Kenji Hashinoki, Masayoshi Shiga, Koji Hashimoto | 2004-09-14 |
| 6790287 | Substrate processing apparatus, substrate inspection method and substrate processing system | Masayoshi Shiga, Kenji Hashinoki, Joichi Nishimura | 2004-09-14 |
| 6688189 | Robot | Yasuhiko Hashimoto, Joichi Nishimura | 2004-02-10 |