Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833949 | Film coated optical lithography elements and method of making | Robert Maier, Charlene Marie Smith | 2004-12-21 |
| 6817211 | Vacuum ultraviolet transmitting direct deposit vitrified silicon oxyfluoride lithography glass photomask blanks | John T. Brown, Stephen Charles Currie, Susan Lee Schiefelbein, Robert S. Pavlik, Jr. | 2004-11-16 |
| 6782716 | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass | Charlene Marie Smith | 2004-08-31 |
| 6783898 | Projection lithography photomask blanks, preforms and method of making | George E. Berkey, Charles Yu | 2004-08-31 |
| 6689516 | Projection lithography photomasks and method of making | George E. Berkey, Michelle D. Pierson | 2004-02-10 |
| 6682859 | Vacuum ultraviolet trasmitting silicon oxyfluoride lithography glass | Charlene Marie Smith | 2004-01-27 |