Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833949 | Film coated optical lithography elements and method of making | Robert Maier, Lisa Anne Moore | 2004-12-21 |
| 6828262 | UV photosensitive melted glasses | Nicholas Francis Borrelli, George B. Hares | 2004-12-07 |
| 6806039 | Photolithographic element blank calcium strontium fluoride UV transmitting mixed fluoride crystal with minimized spatial dispersion | Douglas Clippinger Allan, Nicholas Francis Borrelli, Robert W. Sparrow | 2004-10-19 |
| 6801562 | High repetition rate excimer laser system | Michael Pell, Robert W. Sparrow, Paul Michael Then | 2004-10-05 |
| 6796148 | Deep UV laser internally induced densification in silica glasses | Nicholas Francis Borrelli, Douglas Clippinger Allan | 2004-09-28 |
| 6782716 | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass | Lisa Anne Moore | 2004-08-31 |
| 6765717 | Preferred crystal orientation optical elements from cubic materials | Douglas Clippinger Allan, Nicholas Francis Borrelli, Bryan D. Stone | 2004-07-20 |
| 6754002 | Photolithography methods and systems | Nicholas Francis Borrelli, Johannes Moll | 2004-06-22 |
| 6682859 | Vacuum ultraviolet trasmitting silicon oxyfluoride lithography glass | Lisa Anne Moore | 2004-01-27 |