Showing 1–9 of 9 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Hans Butler | Asml Netherlands B.V. | 3 |
| 2 | Everhardus Cornelis Mos | Asml Netherlands B.V. | 2 |
| 3 | Jan Krikke | Asml Netherlands B.V. | 1 |
| 3 | Cheng-Qun Gui | Asml Netherlands B.V. | 1 |
| 3 | Herman Stegehuis | Koniniklijke Philips N.V. | 1 |
| 3 | Robertus J. M. Van Turnhout | — | 1 |
| 3 | Patrick Petrus Egbertus Wilhelmus van Zutven | — | 1 |
| 3 | Willem Michael Post | — | 1 |
| 3 | Marco Hugo Petrus Moers | Asml Netherlands B.V. | 1 |