Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6732004 | Computer program for determining a corrected position of a measured alignment mark, device manufacturing method, and device manufactured thereby | Maurits Van Der Schaar | 2004-05-04 |
| 6704089 | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby | Maurits Van Der Schaar, Irwan Dani Setija | 2004-03-09 |