Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768539 | Lithographic apparatus | Cheng-Qun Gui, Henricus Van Buel, Arie Jeffrey Den Boef | 2004-07-27 |
| 6732004 | Computer program for determining a corrected position of a measured alignment mark, device manufacturing method, and device manufactured thereby | Everhardus Cornelis Mos | 2004-05-04 |
| 6704089 | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby | Irwan Dani Setija, Everhardus Cornelis Mos | 2004-03-09 |