Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830971 | High K artificial lattices for capacitor applications to use in CU or AL BEOL | Subramanian Balakumar, Chew Hoe Ang, Jia Zhen Zheng | 2004-12-14 |
| 6726545 | Linear polishing for improving substrate uniformity | Subramanian Balakumar, Chen Feng, Victor Lim, Mukhopadhyay Madhusudan, Chivukula Subrahmanyam +1 more | 2004-04-27 |
| 6673695 | STI scheme to prevent fox recess during pre-CMP HF dip | Victor Lim | 2004-01-06 |