Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815823 | Copper metal structure for the reduction of intra-metal capacitance | Young Way Teh, Ting Cheong Ang | 2004-11-09 |
| 6726545 | Linear polishing for improving substrate uniformity | Subramanian Balakumar, Chen Feng, Paul Proctor, Mukhopadhyay Madhusudan, Chivukula Subrahmanyam +1 more | 2004-04-27 |
| 6673695 | STI scheme to prevent fox recess during pre-CMP HF dip | Paul Proctor | 2004-01-06 |