Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790586 | Resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Jun Watanabe, Yoshio Kawai, Masaru Sasago +5 more | 2004-09-14 |
| 6723485 | Positive resist composition and process for forming resist pattern using same | Michitaka Ootani, Kazuhiko Maeda | 2004-04-20 |
| 6710148 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Jun Watanabe, Yoshio Kawai, Masaru Sasago +5 more | 2004-03-23 |
| 6680389 | Ester compounds | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Michitaka Ootani, Satoru Miyazawa +1 more | 2004-01-20 |