Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800833 | Electromagnetically levitated substrate support | Mariusch Gregor, Vincent Seidl | 2004-10-05 |
| 6752585 | Method and apparatus for transferring a semiconductor substrate | Jayesh Patel | 2004-06-22 |
| 6741948 | Method and apparatus for fixing a location | Christoph Hauger, Werner Poltinger, Margit Krause-Bonte, Theo Lasser | 2004-05-25 |