Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800833 | Electromagnetically levitated substrate support | Mariusch Gregor, Peter Reimer | 2004-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800833 | Electromagnetically levitated substrate support | Mariusch Gregor, Peter Reimer | 2004-10-05 |