Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809802 | Substrate attracting and holding system for use in exposure apparatus | Izumi Tsukamoto, Itaru Fujita, Hideki Nogawa | 2004-10-26 |
| 6762826 | Substrate attracting and holding system for use in exposure apparatus | Izumi Tsukamoto, Itaru Fujita, Hideki Nogawa | 2004-07-13 |