Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809802 | Substrate attracting and holding system for use in exposure apparatus | Izumi Tsukamoto, Itaru Fujita, Yukio Takabayashi | 2004-10-26 |
| 6801301 | Exposure apparatus | Yoshikazu Miyajima | 2004-10-05 |
| 6762826 | Substrate attracting and holding system for use in exposure apparatus | Izumi Tsukamoto, Itaru Fujita, Yukio Takabayashi | 2004-07-13 |
| 6717653 | Moving mechanism in exposure apparatus, and exposure apparatus having the same | Kazunori Iwamoto | 2004-04-06 |