Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767593 | Apparatus and process for forming a deposited film | — | 2004-07-27 |
| 6761128 | Plasma treatment apparatus | Toshiyasu Shirasuna, Tatsuyuki Aoike, Hitoshi Murayama, Takashi Otsuka, Daisuke Tazawa +2 more | 2004-07-13 |
| 6712019 | Film forming apparatus having electrically insulated element that introduces power of 20-450MHz | — | 2004-03-30 |
| 6702898 | Deposited film forming apparatus | Kazuto Hosoi, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura, Hitoshi Murayama | 2004-03-09 |