Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6761128 | Plasma treatment apparatus | Toshiyasu Shirasuna, Tatsuyuki Aoike, Kazuyoshi Akiyama, Takashi Otsuka, Daisuke Tazawa +2 more | 2004-07-13 |
| 6702898 | Deposited film forming apparatus | Kazuto Hosoi, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura, Kazuyoshi Akiyama | 2004-03-09 |
| 6696108 | Vacuum processing method | Toshiyasu Shirasuna, Hiroaki Niino, Makoto Aoki | 2004-02-24 |