Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830503 | Catalyst/oxidizer-based CMP system for organic polymer films | — | 2004-12-14 |
| 6767476 | Polishing composition for metal CMP | Shumin Wang, Christopher C. Streinz, Eric W. G. Hoglund | 2004-07-27 |
| 6705926 | Boron-containing polishing system and method | Renjie Zhou, Isaac K. Cherian | 2004-03-16 |
| 6685540 | Polishing pad comprising particles with a solid core and polymeric shell | Isaac K. Cherian, Sriram Anjur | 2004-02-03 |