Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6696362 | Method for using an in situ particle sensor for monitoring particle performance in plasma deposition processes | Kent Rossman, Phillip D. Nguyen | 2004-02-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6696362 | Method for using an in situ particle sensor for monitoring particle performance in plasma deposition processes | Kent Rossman, Phillip D. Nguyen | 2004-02-24 |