Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821577 | Staggered in-situ deposition and etching of a dielectric layer for HDP CVD | — | 2004-11-23 |
| 6704913 | In situ wafer heat for reduced backside contamination | — | 2004-03-09 |
| 6696362 | Method for using an in situ particle sensor for monitoring particle performance in plasma deposition processes | Leonard J. Olmer, Phillip D. Nguyen | 2004-02-24 |