Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750145 | Method of eliminating agglomerate particles in a polishing slurry | William Easter, John A. Maze, Sailesh Mansinh Merchant, Frank Miceli | 2004-06-15 |
| 6730603 | System and method of determining a polishing endpoint by monitoring signal intensity | William Easter, Frank Miceli, Yifeng Yang | 2004-05-04 |
| 6726537 | Polishing carrier head | William Easter, John A. Maze, Frank Miceli | 2004-04-27 |