Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827816 | In situ module for particle removal from solid-state surfaces | David Yogev, Ehud Poles, Amir Wachs | 2004-12-07 |
| 6764386 | Air bearing-sealed micro-processing chamber | — | 2004-07-20 |