Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827816 | In situ module for particle removal from solid-state surfaces | Yoram Uziel, Ehud Poles, Amir Wachs | 2004-12-07 |
| 6829035 | Advanced mask cleaning and handling | — | 2004-12-07 |
| 6799584 | Condensation-based enhancement of particle removal by suction | Yoram Uzeil, Lev Frisman, Amir Wachs | 2004-10-05 |