Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753270 | Process for depositing a porous, low dielectric constant silicon oxide film | Frederic Gaillard | 2004-06-22 |
| 6733955 | Methods for forming self-planarized dielectric layer for shallow trench isolation | Frederic Gaillard | 2004-05-11 |
| 6703321 | Low thermal budget solution for PMD application using sacvd layer | Frederic Gaillard | 2004-03-09 |