Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812159 | Method of forming a low leakage dielectric layer providing an increased capacitive coupling | Karsten Wieczorek, Lutz Herrmann | 2004-11-02 |
| 6723663 | Technique for forming an oxide/nitride layer stack by controlling the nitrogen ion concentration in a nitridation plasma | Karsten Wieczorek, Lutz Herrmann | 2004-04-20 |
| 6703278 | Method of forming layers of oxide on a surface of a substrate | Karsten Wieczorek, Stephan Kruegel | 2004-03-09 |