Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818358 | Method of extending the areas of clear field phase shift generation | Todd P. Lukanc | 2004-11-16 |
| 6797438 | Method and enhancing clear field phase shift masks with border around edges of phase regions | Todd P. Lukanc | 2004-09-28 |
| 6749970 | Method of enhancing clear field phase shift masks with border regions around phase 0 and phase 180 regions | Todd P. Lukanc | 2004-06-15 |
| 6749971 | Method of enhancing clear field phase shift masks with chrome border around phase 180 regions | Todd P. Lukanc | 2004-06-15 |
| 6675369 | Method of enhancing clear field phase shift masks by adding parallel line to phase 0 region | Todd P. Lukanc | 2004-01-06 |