Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804288 | Electron beam exposure apparatus and electron beam deflection apparatus | — | 2004-10-12 |
| 6787780 | Multi-beam exposure apparatus using a multi-axis electron lens, fabrication method of a semiconductor device | Shinichi Hamaguchi, Hiroshi Yasuda | 2004-09-07 |
| 6777694 | Electron beam exposure system and electron lens | — | 2004-08-17 |
| 6764925 | Semiconductor device manufacturing system and electron beam exposure apparatus | Hiroshi Yasuda, Shinichi Hamaguchi | 2004-07-20 |
| 6727658 | Electron beam generating apparatus and electron beam exposure apparatus | Yoshihisa Ooae, Yoichi Shimizu, Takamasa Satoh | 2004-04-27 |
| 6703624 | Multi-beam exposure apparatus using a multi-axis electron lens, electron lens convergencing a plurality of electron beam and fabrication method of a semiconductor device | Shinichi Hamaguchi, Hiroshi Yasuda | 2004-03-09 |