Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787780 | Multi-beam exposure apparatus using a multi-axis electron lens, fabrication method of a semiconductor device | Takeshi Haraguchi, Hiroshi Yasuda | 2004-09-07 |
| 6764925 | Semiconductor device manufacturing system and electron beam exposure apparatus | Hiroshi Yasuda, Takeshi Haraguchi | 2004-07-20 |
| 6703624 | Multi-beam exposure apparatus using a multi-axis electron lens, electron lens convergencing a plurality of electron beam and fabrication method of a semiconductor device | Takeshi Haraguchi, Hiroshi Yasuda | 2004-03-09 |