Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730523 | Low temperature chemical vapor deposition process for forming bismuth-containing ceramic thin films useful in ferroelectric memory devices | Frank Hintermaier, Christine Dehm, Wolfgang Hoenlein, Jeffrey F. Roeder, Bryan C. Hendrix +2 more | 2004-05-04 |
| 6709610 | Isotropic dry cleaning process for noble metal integrated circuit structures | Frank Dimeo, Jr., Peter S. Kirlin, Thomas H. Baum | 2004-03-23 |
| 6699402 | Chemical mechanical polishing compositions for CMP removal of iridium thin films | Michael W. Russell, Jonathan Wolk, George E. Emond | 2004-03-02 |