Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645862 | Double-side polishing process with reduced scratch rate and device for carrying out the process | Johann Glas, Thomas Altmann, Gerhard Heier | 2003-11-11 |
| 6583050 | Semiconductor wafer with improved flatness, and process for producing the semiconductor wafer | Thomas Altmann, Ernst Feuchtinger, Willibald Bernwinkler, Wolfgang Winkler, Gerhard Heier | 2003-06-24 |
| 6566267 | Inexpensive process for producing a multiplicity of semiconductor wafers | — | 2003-05-20 |
| 6530826 | Process for the surface polishing of silicon wafers | Thomas Buschhardt, Heinrich Hennhofer, Bruno Lichtenegger | 2003-03-11 |
| 6514424 | Process for the double-side polishing of semiconductor wafers and carrier for carrying out the process | Gerhard Heier, Wolfgang Winkler, Thomas Altmann | 2003-02-04 |