Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569771 | Carrier head for chemical mechanical polishing | Tzu-Shin Chen, Chien-Hsin Lai, Yung-Tsung Wei | 2003-05-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569771 | Carrier head for chemical mechanical polishing | Tzu-Shin Chen, Chien-Hsin Lai, Yung-Tsung Wei | 2003-05-27 |