Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648729 | Wafer pressure regulation system for polishing machine | Cheng-Chi Hsieh, Jung-Nan Tseng, Huang-Yi Lin, Fu-Yang Yu | 2003-11-18 |
| 6569771 | Carrier head for chemical mechanical polishing | Juen-Kuen Lin, Tzu-Shin Chen, Yung-Tsung Wei | 2003-05-27 |