Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6502530 | Design of gas injection for the electrode in a capacitively coupled RF plasma reactor | Emmanuel Turlot, Jean-Baptiste Chevrier, Jacques Schmitt | 2003-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6502530 | Design of gas injection for the electrode in a capacitively coupled RF plasma reactor | Emmanuel Turlot, Jean-Baptiste Chevrier, Jacques Schmitt | 2003-01-07 |