Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6533534 | Method for improving the rate of a plasma enhanced vacuum treatment | Paul Muralt | 2003-03-18 |
| 6507145 | Ballast layer for field emissive device | Emmanuel Turlot, Hanh Pham, Francois Leblanc | 2003-01-14 |
| 6502530 | Design of gas injection for the electrode in a capacitively coupled RF plasma reactor | Emmanuel Turlot, Jean-Baptiste Chevrier, Jean Barreiro | 2003-01-07 |