Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6671042 | Multiple beam scanner for an inspection system | — | 2003-12-30 |
| 6671398 | Method and apparatus for inspection of patterned semiconductor wafers | Silviu Reinhorn | 2003-12-30 |
| 6657714 | Defect detection with enhanced dynamic range | Boris Goldberg, Ron Naftali | 2003-12-02 |
| 6639201 | Spot grid array imaging system | Oren Reches | 2003-10-28 |
| 6587193 | Inspection systems performing two-dimensional imaging with line light spot | Silviu Reinhron | 2003-07-01 |