Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641302 | Thermal process apparatus for a semiconductor substrate | Yicheng Li, Takeshi Sakuma | 2003-11-04 |
| 6534749 | Thermal process apparatus for measuring accurate temperature by a radiation thermometer | — | 2003-03-18 |