Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641302 | Thermal process apparatus for a semiconductor substrate | Yicheng Li, Takashi Shigeoka | 2003-11-04 |
| 6537422 | Single-substrate-heat-processing apparatus for semiconductor process | Kenji Homma, Takahiro Horiguchi | 2003-03-25 |
| 6506253 | Photo-excited gas processing apparatus for semiconductor process | — | 2003-01-14 |