Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642149 | Plasma processing method | Tomoki Suemasa, Tsuyoshi Ono, Makoto Sekine, Itsuko Sakai, Yukimasa Yoshida | 2003-11-04 |
| 6602435 | Etching method | Masahiro Yamada, Youbun Ito | 2003-08-05 |