Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642149 | Plasma processing method | Tomoki Suemasa, Tsuyoshi Ono, Kouichiro Inazawa, Itsuko Sakai, Yukimasa Yoshida | 2003-11-04 |
| 6605542 | Manufacturing method of semiconductor devices by using dry etching technology | Shoji Seta, Naofumi Nakamura | 2003-08-12 |