Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534221 | Method for fabricating continuous space variant attenuating lithography mask for fabrication of devices with three-dimensional structures and microelectronics | Michael Jin, Miles L. Scott | 2003-03-18 |
| 6524755 | Phase-shift masks and methods of fabrication | Michael Jin, James A. Reynolds | 2003-02-25 |