Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613498 | Modulated exposure mask and method of using a modulated exposure mask | David R. Brown, Barry S. McCoy, Gerald Tuck, Bruce H. Peters | 2003-09-02 |
| 6534221 | Method for fabricating continuous space variant attenuating lithography mask for fabrication of devices with three-dimensional structures and microelectronics | Sing H. Lee, Michael Jin | 2003-03-18 |