Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668207 | Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients | James A. Folta, Christopher C. Walton | 2003-12-23 |
| 6634760 | Low-cost method for producing extreme ultraviolet lithography optics | James A. Folta, John S. Taylor, Eberhard A. Spiller | 2003-10-21 |
| 6524449 | Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients | James A. Folta, Christopher C. Walton | 2003-02-25 |